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Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) Silicon
- Cho, Chun-Hyung;
- Choi, Ginkyu;
- Cha, Ho-Young
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2Citations
SCOPUS
2초록
We have fabricated VDP (van der Pauw) stress sensors on (111) silicon surfaces. This work focuses on a study of strain effects in VDP stress sensors, which were generally ignored in previous works, for the precise measurements of die stresses in electronic packages. The stress sensitivity was observed to be approximately 10% larger for p-type VDP sensors compared to n-type VDP sensors.
키워드
VDP (van der Pauw) strain effects (111) silicon stress sensors; piezo-resistive coefficients
- 제목
- Strain Effects in van der Pauw (VDP) Stress Sensor Fabricated on (111) Silicon
- 저자
- Cho, Chun-Hyung; Choi, Ginkyu; Cha, Ho-Young
- 발행일
- 2010-05
- 유형
- Article
- 권
- E93C
- 호
- 5
- 페이지
- 640 ~ 643