Errors in Pi-Coefficients Due to the Strain Effects in Resistor Stress Sensor on (001) Silicon

초록

This work focuses on a study of strain effects in resistor stress sensors fabricated on (001) silicon and their influences on the determination of piezoresistive (pi) coefficients for the precise measurements of die stresses in electronic packages. We obtained the corrected values of the pi-coefficients by considering the strain effects, without which more than 50% discrepancies may be induced.

키워드