A Study on Shear-stress Calibration by the Mid-point Measurements in+45/-45 Degree Semiconductor Resistor-pair

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초록

In this research, we proposed the simple and efficient method to calculate the shear stresses by using the mid-point measurements in +/- 45 degrees semicon-ductor resistor-sensor pair. Compared to the previous works, the measurements became much simpler by combining the approximation theory with the technique of mid-point measurement. In addition, we proposed another novel method for the stress calculation in which we could increase the sensitivity of the stress sensor by controlling the applied voltage between the sensor-pair. For the applied voltage of 8 V, the sensitivity showed a significant increase by 100%.

키워드

Shear-stress; sensor-sensitivity; stress-sensor; resistor-sensor; semiconductor-sensor; SILICON; SENSORS
제목
A Study on Shear-stress Calibration by the Mid-point Measurements in+45/-45 Degree Semiconductor Resistor-pair
저자
Cho, Chun-Hyung; Cha, Ho-Young; Sung, Hyuk-Kee
DOI
10.5573/JSTS.2017.17.2.180
발행일
2017-04
유형
Article
저널명
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
권
17
호
2
페이지
180 ~ 185