V-band monolithic microwave integrated circuit with continuous wave output power of > 23.5 dBm using conventional AlGaN/GaN-on-Si structure

  • Kim, Dong-Hwan; 
  • Eom, Su-Keun; 
  • Kang, Myoung-Jin; 
  • Jeong, Jun-Seok; 
  • Seo, Kwang-Seok; 
  • ... Cha, Ho-Young
Citations

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초록

This letter reports an AlGaN/GaN-on-Si power amplifier (PA) monolithic microwave integrated circuit (MMIC) operating at V-band using advanced gate processing technology. The AlGaN/GaN-on-Si high electron mobility transistors (HEMTs) employed a gate length of 100 nm with a double-deck shaped (DDS) field-plate, which resulted in a cut-off frequency of 68 GHz and a maximum oscillation frequency of 160 GHz at the drain voltage of 15V with significant reduction in gate resistance and improvement of current collapse phenomenon. A 60GHz three-stage PA MMIC composed of two 4 x 37 mu m and an 8 x 37 lm AlGaN/GaN-on-Si HEMTs successfully demonstrated using the DDS field-plate gate technology, which exhibited a continuous wave output power of > 23.5 dBm at the drain voltage of 18V at 58 GHz. This is the highest output power performance for V-band power amplification based on AlGaN/GaN-on-Si technology. (C) 2016 American Vacuum Society.

키워드

SILICON SUBSTRATE; HEMTS; TECHNOLOGY
제목
V-band monolithic microwave integrated circuit with continuous wave output power of > 23.5 dBm using conventional AlGaN/GaN-on-Si structure
저자
Kim, Dong-Hwan; Eom, Su-Keun; Kang, Myoung-Jin; Jeong, Jun-Seok; Seo, Kwang-Seok; Cha, Ho-Young
DOI
10.1116/1.4947005
발행일
2016-07
유형
Article
저널명
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
권
34
호
4