Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns

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초록

In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%similar to 70%. Also, in this paper, more simple and convenient stress-measurement method was presented.

키워드

Meandering -pattern; sensitivity; stress sensors; piezo-resistive coefficients; PIEZORESISTIVE COEFFICIENTS; TEMPERATURE-DEPENDENCE; SILICON; CALIBRATION
제목
Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns
저자
Cho, Chun-Hyung; Cha, Ho-Young
DOI
10.5573/JSTS.2015.15.1.001
발행일
2015-02
유형
Article
저널명
JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
권
15
호
1
페이지
1 ~ 6