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Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns
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5초록
In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%similar to 70%. Also, in this paper, more simple and convenient stress-measurement method was presented.
키워드
Meandering -pattern; sensitivity; stress sensors; piezo-resistive coefficients; PIEZORESISTIVE COEFFICIENTS; TEMPERATURE-DEPENDENCE; SILICON; CALIBRATION
- 제목
- Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns
- 저자
- Cho, Chun-Hyung; Cha, Ho-Young
- 발행일
- 2015-02
- 유형
- Article
- 권
- 15
- 호
- 1
- 페이지
- 1 ~ 6
- 언어
- ENG
- 출판사
- IEEK PUBLICATION CENTER
- 발행국가
- 대한민국
- 분량
- 6 페이지
- ISSN
- E 2233-4866
P 1598-1657