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Volatile Nickel Aminoalkoxide Complexes as Liquid Precursors for Non-volatile Memory Device of NiO Films by ALD
- Chung, Taek-Mo;
- Lee, Sun Sook;
- Cho, Wontae;
- Kim, Minchan;
- Lee, Young Kuk;
- ... Hwang, Jin-Ha;
- 외 2명
Citations
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12Citations
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12키워드
Nickel oxide; Precursor; ReRAM; ALD; Aminoalkoxide; CHEMICAL-VAPOR-DEPOSITION; ATOMIC LAYER DEPOSITION; TRANSITION
- 제목
- Volatile Nickel Aminoalkoxide Complexes as Liquid Precursors for Non-volatile Memory Device of NiO Films by ALD
- 저자
- Chung, Taek-Mo; Lee, Sun Sook; Cho, Wontae; Kim, Minchan; Lee, Young Kuk; Hwang, Jin-Ha; An, Ki-Seok; Kim, Chang Gyoun
- 발행일
- 2011-03-20
- 유형
- Article
- 권
- 32
- 호
- 3
- 페이지
- 783 ~ 784
- 언어
- ENG
- 출판사
- WILEY-V C H VERLAG GMBH
- 발행국가
- 독일
- 분량
- 2 페이지
- ISSN
- E 1229-5949
P 0253-2964