SOI 슬롯 광 도파로를 활용한2×2 Balanced-Bridge Mach-Zehnder 간섭형 집적광학 바이오케미컬 센서 설계 및 성능평가

초록

An integrated-optical biochemical sensor structure that can perform homogeneous and surface sensing using a 2×2 balanced-bridge Mach-Zehnder interference structure based on the optimized SOI slot optical waveguide was described, and its performance and characteristics were evaluated. Equations for the two output optical powers were derived and examined using the transfer matrices of a 3-dB coupler and phase shifter (channel waveguide). The length of the 3-dB coupler was determined such that the two output optical powers were same using these formulas. In homogeneous sensing, the effect of the refractive index of an analyte in the range of 1.33−1.36 on the two output optical power distributions was numerically derived, and the sensitivity was calculated based on each output and the difference between the two outputs, the former and the latter being 7.5796−19.0305 [au/RIU] and, 15.2601−38.1351 [au/RIU], respectively. In the case of surface sensing, the sensitivity range of the refractive index of 1.337 based on each of the two outputs was calculated as -2.2490−-3.5854 [au/RIU] and 1.2194−3.8012 [au/RIU], and the sensitivity range of 4.8048−7.0694 [au/RIU] was confirmed based on the difference between the two outputs

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