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The effects of crystallographic misaligment in application of piezoresistive stress sensors on (001) silicon
- 제목
- The effects of crystallographic misaligment in application of piezoresistive stress sensors on (001) silicon
- 저자
- Cho, Chun Hyung; 차호영
- 발행일
- 2011-06
- 저널명
- AWAD