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Measurement: Journal of the International Measurement Confederation
ISSN
P 0263-2241 E 1873-412X
출판사
Elsevier BV
국가
ENGLAND
발행 상태
활성
데이터베이스 수록 정보
CiteScore 2011-2025 (15년)
JCR 2002-2025 (24년)
SCIE 2010-2026 (17년)
Scopus 1983-2026 (44년)
SJR 1999-2020, 2022-2025 (26년)
전체 8건 중 1번부터 8번까지의 결과를 표시합니다.
2026
Article
Explainable integration of process and optical parameters for plasma etch depth prediction
- Myung, Jihoon ;
- Go, Eunseo ;
- Cho, Donghyun ;
- Ko, Minkyung ;
- Jeon, Nari ;
- ... Kim, Jaehyun ;
- ... Hahn, Bongsu ;
- ... Jung, Yongsu ;
- 외 2명
- 2026-03-01
- Journal of Vacuum Science and Technology A
- AVS Science and Technology Society
2025
Article
Role of a cyclopentadienyl ligand in Hf precursors using H2O or O3 as oxidant in atomic layer deposition
- Song, Youngmin ;
- Kim, Hui-Jin ;
- Lee, Soo Hyun ;
- Kwon, Sujin ;
- Shong, Bonggeun ;
- 외 1명
- 2025-03
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
Article
Chemical mechanism for nucleation enhancement in atomic layer deposition of Pt by surface functionalization
- Kwon, Sujin ;
- Shong, Bonggeun
- 2025-01
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2023
Article
Mechanistic analysis on low temperature thermal atomic layer deposition of nitrides utilizing H2S
- Lee, Jinwoo ;
- Lee, Soo Hyun ;
- Shong, Bonggeun
- 2023-12-01
- Journal of Vacuum Science and Technology A
- AVS Science and Technology Society
Article
Adsorption mechanism of dimeric Ga precursors in metalorganic chemical vapor deposition of gallium nitride
- Kim, Hankyu ;
- Kim, Miso ;
- Kim, Bumsang ;
- Shong, Bonggeun
- 2023-12
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2019
Article
Surface chemical reactions during atomic layer deposition of ZnO, ZnS, and Zn(O,S)
- Tran Thi Ngoc Van ;
- Ansari, Abu Saad ;
- Shong, Bonggeun
- 2019-03
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2018
Article
Initial reactions of ultrathin HfO2 films by in situ atomic layer deposition: An in situ synchrotron photoemission spectroscopy study
- Kim, Seok Hwan ;
- Song, Wooseok ;
- Jeon, In Su ;
- Lee, Sun Sook ;
- Chung, Taek-Mo ;
- 외 1명
- 2018-03
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS
2008
Article
Top-emitting organic light-emitting diodes with Ba/Ag/indium tin oxide cathode and built-in potential analyses in these devices
- Lim, J. T. ;
- Lee, J. H. ;
- Yeom, G. Y. ;
- Lee, E. H. ;
- Kim, T. W.
- 2008-07
- Journal of Vacuum Science and Technology A
- A V S AMER INST PHYSICS