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자료 필터
자료유형
발행연도
2021 ~ 2026
2021 2026
키워드
언어
전체 5건 중 1번부터 5번까지의 결과를 표시합니다.
2026
Article
Explainable integration of process and optical parameters for plasma etch depth prediction
- Myung, Jihoon ;
- Go, Eunseo ;
- Cho, Donghyun ;
- Ko, Minkyung ;
- Jeon, Nari ;
- ... Kim, Jaehyun ;
- ... Hahn, Bongsu ;
- ... Jung, Yongsu ;
- 외 2명
- 2026-03-01
- Journal of Vacuum Science and Technology A
- AVS Science and Technology Society
2025
2023
2022
2021
Article
Analysis of transient temperature response under micro jet impinging using nitrogen (N2)
- 2021-08
- Journal of Mechanical Science and Technology
- KOREAN SOC MECHANICAL ENGINEERS