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자료 필터
자료유형
발행연도
2012 ~ 2025
2012 2025
키워드
언어
전체 20건 중 1번부터 10번까지의 결과를 표시합니다.
2025
Article
Simulation analysis of resist flow in contact hole shrinkage and its impact on block copolymers
- 2025-11
- Solid-State Electronics
- PERGAMON-ELSEVIER SCIENCE LTD
2024
Article
Contact Hole Shrinkage: Simulation Study of Resist Flow Process and Its Application to Block Copolymers
- 2024-09
- Micromachines
- MDPI
Article
Theoretical study of extreme ultraviolet pellicles with nanometer thicknesses
- 2024-06
- Solid-State Electronics
- Elsevier Ltd
2023
2021
Article
Line‐edge roughness from extreme ultraviolet lithography to fin‐field‐effect‐transistor: Computational study
- 2021-12
- Micromachines
- MDPI
Article
Computational Sub-10 nm Plasmonic Nanogap Patterns by Block Copolymer Self-Assembly
- 2021-07
- Journal of Nanoelectronics and Optoelectronics
- AMER SCIENTIFIC PUBLISHERS
Article
Defect repairs for the extreme ultraviolet mask
- 2021
- Proceedings of SPIE - The International Society for Optical Engineering
- SPIE
2019
Article
Line-Edge Roughness Stochastics for 5-nm Pattern Formation in the Extreme Ultraviolet Lithography
- 2019-08
- Journal of Nanoscience and Nanotechnology
- AMER SCIENTIFIC PUBLISHERS
2018
Article
Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography
- 2018-10
- Journal of Nanoscience and Nanotechnology
- AMER SCIENTIFIC PUBLISHERS
2017
Article
A Molecular View of Block Copolymer Directed Assembly with Solvent Vapors Simulation
- 2017-11
- Journal of Nanoscience and Nanotechnology
- AMER SCIENTIFIC PUBLISHERS
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